ECE/ChBE 4752 Fall 2007 Web Page


Syllabus and Assignment Schedule

Note: Diffusion Lab is now due November 15


Class Handbook (2 MB PDF Document)

Sample Oxidation Laboratory

Sample Exam 1

SUPREM simulation information

Guidelines for the Diffusion Lab Report

Diffusion Figures

The link above contains the 4 Irvin's curves, the solid solubility of dopants in silicon as a function of temperature, and a phosphorous measured diffusion profile at high concentration and low temperature (which may be more representative of your phos predep than the simple erfc theory).

Guidelines for the Final Report

In understanding the operation of the digital integrated circuitry you've fabricated, you might find this webpage useful.

Some information on mobility of carriers in silicon