MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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Micro Power Convertor

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Ultraminiaturized Magnetic Generator

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Micro-compass

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Miniaturized RF Passive Components

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Released Jet from Microcombustor

 

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The MSMA Group is a part of the School of Electrical and Computer Engineering at the Georgia Institute of Technology.

 

Prof Mark Allen’s research group MSMA focuses on the designs, fabrications, tests and packaging of Micro Electro-Mechanical Systems (MEMS) for applications ranging from high temperature wireless pressure sensor integrated in jet engines to microneedles for painless drug delivery. By combining standard IC microfabrication processes with alternative micro-manufacturing techniques such as laser machining, polymer casting, metal electroplating and materials lamination, the MSMA group has developed devices for a large number of applications.

 

 

The MSMA Group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT)

 

 

 

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Micromachined in-plane Silicon Nozzle

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High Temperature Wireless Pressure Sensor

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PMMA Microneedles

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3-D Multielectrode Arrays

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Corrugated Pattern Array on SLA Manifold Substrate

http://www.ece.gatech.edu/cgi-bin/Count.cgi?df=msma.dat visitors since February 3, 2006.

 

 

Last modified on August 2, 2011

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