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MicroSensors and MicroActuators

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Electroplating bonding technology for chip interconnect, wafer level packaging and interconnect layer structures by Yeun-Ho Joung (PhD thesis nov. 2003)

Hollow microneedles for painless drug delivery (Ph.D thesis) by Shawn P.Davis (2003)

 

A micromachined resonant magnetic field sensor (MS thesis) by Thierry C. Leďchlé (2003)

 

Solid Fuel Development for Gas-Generating Microactuators (MS-presentation) by Heather Hude (2003)

 

Robust micromachined capacitive pressure sensores for mechanically harsh environments (Ph.D thesis) by Sung Pil Chang (2002)

 

Fabrication of micromechanical structures of titania and titanium with electrophoretic deposition (PhD thesis) by Claus Marquodt (june 2000)

 

Wireless micromachined ceramic pressure sensors for high temperature environments (PhD thesis) by Jennifer M. English (April 2000)

 

A Micromachined Pendulous Oscillating Gyroscopic Accelerometer (Ph.D defense) by Todd J. Kaiser (March 2000)

 

Modified on Tuesday 19 November 2003

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