MicroSensors and MicroActuators

Georgia Tech MEMS group

 

 

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(click on the course to access to the webpage)

 

These courses are offered by the School of ECE.

ECE 6450 - Introduction to Micro Electronics Technology
This course presents the fundamentals of microelectronics material, device, and circuit fabrication.

ECE 4752 - Integrated Circuit Fabrication
The objective of this course is to give students exposure to the various steps involved in the fabrication of integrated circuits and devices. The course will include a laboratory segment in which students fabricate MOS transistors, diffused resistors and MOS capacitors from a bare silicon substrate.

 

 

Last modified on February 27, 2006

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