MicroSensors and MicroActuators Georgia Tech MEMS group
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(click on the course to access to the webpage) These courses are offered by the School of ECE. ECE 6450 - Introduction to Micro Electronics Technology This course presents the fundamentals of microelectronics material, device, and circuit fabrication. ECE 4752 - Integrated Circuit Fabrication The objective of this course is to give students exposure to the various steps involved in the fabrication of integrated circuits and devices. The course will include a laboratory segment in which students fabricate MOS transistors, diffused resistors and MOS capacitors from a bare silicon substrate.
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